MEMS Inertial Sensors

Seminar
Wednesday, October 11, 2017
10:00 AM to 11:00 AM
EER .824
Free and open to the public

MEMS inertial sensors are used to measure the acceleration and angular rate of a subject. Compared with traditional inertial sensors, the MEMS inertial sensor has the advantages of small form factor, light weight, low power and low cost. MEMS inertial sensors can be found in many applications, such as gaming, control, positioning, and navigation. Among them, navigation application requires high resolution and low bias instability. The existing MEMS inertial sensors have yet to meet these requirements for inertial navigation. This talk will introduce the concepts and operating principles of MEMS accelerometers based on displacement and force sensing, and the tuning fork gyroscopes. The talk will then present a high-performance MEMS oscillating accelerometer with CMOS readout circuit, which demonstrated, for the first time, a sub-μg bias instability. An open-loop mode-split tuning fork gyroscope achieving a sub-degree bias instability will also be presented.

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Speaker

Yong Ping Xu

Yong Ping Xu

Associate Professor
National University of Singapore

Dr Yong Ping Xu, graduated from Nanjing University, China in 1977, received his PhD from University of New South Wales (UNSW) Australia, in 1994. He joint University of South Australia as a lecturer in 1996. Since 1998, he has been with the Department of Electrical and Computer Engineering, National University of Singapore and is currently an Associate Professor. Prior to his PhD, he worked for Qingdao Semiconductor Research Institute as a design engineer, R&D manager and director from 1978 to 1987. His current research interests include integrated circuit designs for MEMS, sensors and biomedical applications. Dr Xu is currently serving International Technical Program Committee (ITPC) of IEEE International Solid-State Circuits Conference (ISSCC) and VLSI Symposium (VLSI). He is a member of IEEE Asian Solid-State Circuits Conference (A-SSCC) Steering Committee since 2014. He was the A-SSCC 2013 Organizing Committee Chair and TPC member of ASSCC from 2009 to 2013. Dr Xu is a Distinguished Lecturer of IEEE Solid-State Circuits Society.