This talk will introduce the concepts and operating principles of MEMS accelerometers based on displacement and force sensing, and the tuning fork gyroscopes. The talk will then present a high-performance MEMS oscillating accelerometer with CMOS readout circuit, which demonstrated, for the first time, a sub-μg bias instability. An open-loop mode-split tuning fork gyroscope achieving a sub-degree bias instability will also be presented.

This tutorial will focus on the circuit techniques and technologies to enable such high-density neural recording and stimulation. It will go from high-level system design aspects, to processing/technology aspects (electrodes) and will end with specific circuit design techniques.